Method for manufacturing inorganic membranes by...

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B01D 71/02 (2006.01) B01D 67/00 (2006.01) B01D 69/02 (2006.01) B05D 3/00 (2006.01) C01B 13/02 (2006.01) C04B 41/52 (2006.01) C23C 16/04 (2006.01) C23C 16/46 (2006.01)

Patent

CA 2086402

PATENT 173PUS04792 ABSTRACT The present invention is a method for manufacturing inorganic membranes which are capable of separating oxygen from air. The membranes comprise a thin layer of a multicomponent metallic oxide which has been deposited onto a porous substrate by organometallic chemical vapor deposition. The inorganic membranes are formed by reacting organometallic complexes corresponding to each of the respective metals making up the multicomponent metallic oxide and an oxidizing agent under conditions sufficient to deposit a thin layer of the multicomponent metallic oxide onto the porous substrate.

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