Method for manufacturing optical waveguides in semiconductors

Details Method for manufacturing optical waveguides in semiconductors Method for manufacturing optical waveguides in semiconductors

G - Physics

02

B

148/2.8

G02B 6/12 (2006.01) G02B 6/134 (2006.01)

Patent

CA 1204369

METHOD FOR MANUFACTURING OPTICAL WAVEGUIDES IN SEMICONDUCTORS Abstract Optical waveguides are formed in semiconductors, for example, InP and InGaAsP, by indiffusion of selected metal atoms at relatively low diffusion temperatures, e.g. of at least 400°C.

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