Method for manufacturing superconducting device having a...

Details Method for manufacturing superconducting device having a... Method for manufacturing superconducting device having a...

H - Electricity

01

L

H01L 39/24 (2006.01)

Patent

CA 2070340

Abstract of the Disclosure: For manufacturing a superconducting device, a ?-axis orientated oxide superconductor layer is formed on a surface of the substrate and at least one layer which is not composed of an oxide superconductor is formed on the ?-axis orientated oxide superconductor layer. The ?-axis orientated oxide superconductor layer is etched so that at least one side surface of the ?-axis orientated oxide superconductor layer exposed. Then, the substrate is heated in an O2 atmosphere, an O2 atmosphere including O3 or an O3 atmosphere, so that oxygen penetrates into the ?-axis orientated oxide superconductor layer from the exposed side surface. An .alpha.-axis orientated oxide superconductor thin film is formed so as to cover the exposed side surface of the ?-axis orientated oxide superconductor layer.

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