Method for manufacturing workpieces and apparatus

C - Chemistry – Metallurgy – 23 – C

Patent

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Details

C23C 14/56 (2006.01)

Patent

CA 2701402

For vacuum treatment of workpieces by a multitude of distinct processing stations (PI, - Pln, P21 - P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.

Pour traiter des pièces sous vide sur une multitude de stations de traitement distinctes (P11 - P1n, P21 - P2m), on forme deux groupes (I et II) de stations de traitement. Les pièces vont et viennent simultanément entre les stations de traitement du premier groupe (I) mais sont traitées selon une séquence individuelle sélectionnable sur les stations de traitement du second groupe (II).

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