G - Physics – 01 – B
Patent
G - Physics
01
B
33/50
G01B 11/06 (2006.01)
Patent
CA 1313757
ABSTRACT OF THE DISCLOSURE A method for measuring a film thickness comprising the steps of feeding a sheet to be measured by a rotatry shaft while intimately contacting, providing a light shield in parallel to the center of rotation of the rotary shaft at a predetermined distance from the rotary shaft surface to define a gap therebetween, scanning the gap with a laser beam by a reflective mirror, and measuring the time during which the laser beam passes through the gap to determine the film thickness of the sheet to be measured. A different-diameter portion is provided at the end portion of the rotary shaft, calculating a difference between the time during which the laser beam passes through the gap on the different-diameter portion and the time during whcih the laser beam passes through the gap on the portion of the rotary shaft adjacent to the different-diameter portion and on which no sheet to be measured is placed, and correcting the time during which the laser beam passes through between the surface of the sheet to be measured and the light shield by utilizing the calculated difference to obtain the thickness of the sheet to be measured.
597537
Ariki Masayuki
Nagao Toshishige
Nakano Hideki
Tokumaru Makoto
Ariki Masayuki
Marks & Clerk
Mitsubishi Denki Kabushiki Kaisha
Nagao Toshishige
Nakano Hideki
LandOfFree
Method for measuring film thickness does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for measuring film thickness, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for measuring film thickness will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1189554