C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
117/112, 117/53
C23C 4/10 (2006.01) C04B 35/45 (2006.01) H01L 39/24 (2006.01)
Patent
CA 1311659
METHOD FOR METALLIZING SUPERCONDUCTING MATERIAL ONTO SURFACE OF SUBSTRATE BY USE OF PLASMA PHENOMENON ABSTRACT OF THE DISCLOSURE A method for metallizing a superconducting material onto a surface of a substrate by the use of the plasma phenomenon, which comprises the steps of: continuously supplying an operating gas containing an oxygen gas in an amount of at least 30 vol.% into a bore of a metallizing nozzle from a rear end portion thereof; continuously supplying powder of a composite oxide superconducting material containing a CuxOy radical into the bore of the metallizing nozzle from a tip portion thereof; producing an electric arc in the bore of the metallizing nozzle to convert the operation gas into a high-temperature plasma; melting the powder of the superconducting material supplied into the bore by means of the operating gas converted into plasma; uniformly blowing the thus melted powder of the superconducting material from the metalliz- ing nozzle onto a surface of a substrate by means of a jet of the operating gas converted into plasma to form a film of the superconducting material onto the surface of the substrate; and heating the thus formed film of the superconducting film to a temperature of at least 700°C, and then slowly cooling the thus heated film to the room temperature at a cooling rate of up to 40°C/minute.
585873
Kabasawa Makoto
Kosuge Shigeyoshi
Matsuda Yataka
Shinbo Yukio
Tachikawa Kyoji
Kabasawa Makoto
Kosuge Shigeyoshi
Macrae & Co.
Matsuda Yataka
Nkk Corporation
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