H - Electricity – 01 – J
Patent
H - Electricity
01
J
H01J 37/00 (2006.01) B05B 5/00 (2006.01) C23C 14/32 (2006.01) H05H 1/42 (2006.01) H05H 1/48 (2006.01)
Patent
CA 2601729
The invention relates to a vacuum process system for surface-treating work pieces (3) using an arc evaporation source (5). Said system comprises a first electrode (5') connected to a DC power source (13) and a second electrode (3, 18, 20), disposed separately from the arc evaporation source (5). The two electrodes (5', 3, 18, 20) are operated while being connected to a single pulsed power supply (16).
L'invention concerne une installation de traitement sous vide destinée au traitement de la surface de pièces (3) par une source d'évaporation par arc (5) contenant une première électrode (5`) qui est reliée à un bloc d'alimentation en courant continu (13) et à une deuxième électrode (3, 18, 20) séparée de la source d'évaporation par arc (5). Les deux électrodes (5`, 3, 18, 20) fonctionnent en étant reliées à un seul bloc d'alimentation en courant pulsé (16).
Derflinger Volker
Lendi Daniel
Ramm Juergen
Reiter Andreas
Widrig Beno
Fetherstonhaugh & Co.
Oerlikon Trading Ag Truebbach
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