G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 21/84 (2006.01) G01N 21/77 (2006.01) G01N 33/48 (2006.01)
Patent
CA 2701310
The invention relates to a method for optical scanning an object, wherein the method comprises the following steps: optical scanning of a scanning region of the object (2) by means of a detection device (4, 5) by displacing the detection device (4,5) and the object (2) relatively to one another into successive scanning positions which are spaced apart by a scanning step size along a scanning direction in an object plane, generation of a plurality of scanned images by imaging a partial scanning region from the object plane onto a detection surface in an image plane by means of an optical imaging device in the scanning positions, wherein the partial scanning region has an extent in the scanning direction in the object plane which is larger than the scanning step size, breaking down the plurality of scanned images into scanned part images in each case by means of image processing, generation of combined result images by combining a plurality of scanned part images in each case, and selection of at least one object measurement image from the combined result images in accordance with one or a plurality of predetermined selection criteria. The invention furthermore relates to a device for optical scanning an object and a computer program product. (Fig. 1)
Handler Erich
Oranth Norbert
F. Hoffmann La-Roche Ag
Ogilvy Renault Llp/s.e.n.c.r.l.,s.r.l.
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