H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 23/66 (2006.01) C23C 14/10 (2006.01) H01L 21/768 (2006.01) H01L 23/498 (2006.01) H01L 23/532 (2006.01)
Patent
CA 2485185
The invention relates to a method for producing a substrate (1) comprising a conductor assembly (4, 41, 42) that is suitable for use at high frequencies, said substrate having improved high-frequency characteristics. The method comprises the following steps: deposition of a structured glass layer (9, 91, 92, 93, 13) comprising at least one opening (8) above a contact region (71 - 74) by vapour deposition on the substrate (1); and application of at least one conductor structure (100, 111, 112, 113) to the glass layer (9, 91 - 93), which is in electric contact with the contact region (71 - 74).
L'invention concerne un procédé de production d'un substrat (1) comprenant un ensemble conducteur hautes fréquences (4, 41, 42) qui présente de meilleures propriétés hautes fréquences. Ce procédé comprend les étapes consistant à : déposer en phase vapeur sur ledit substrat (1) une couche de verre structurée (9, 91, 92, 93, 13) pourvue d'au moins une ouverture (8) qui est située au-dessus d'une zone de contact (71 - 74) ; et à appliquer sur cette couche de verre (9, 91 - 93) au moins une structure conductrice (100, 111, 112, 113) qui est en contact électrique avec la zone de contact (71 - 74).
Leib Juergen
Mund Dietrich
Kirby Eades Gale Baker
Schott Ag
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