Method for producing a laminated body having a1-based...

C - Chemistry – Metallurgy – 30 – B

Patent

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Details

C30B 29/38 (2006.01) C30B 25/18 (2006.01)

Patent

CA 2712148

The present invention is a method for producing a laminated body, comprising the steps of: (1) preparing a base substrate having a surface formed of a single crystal which is different from the material constituting the Al-based group-III nitride single crystal layer to be formed; (2) forming an Al-based group-III nitride single crystal layer having a thickness of 10 nm to 1.5 µm on the single crystal surface of the prepared base substrate; (3) forming on the Al-based group-III nitride single crystal layer a non-single crystal layer being 100 times or more thicker than the Al-based group-III nitride single crystal layer without breaking the previously-obtained Al-based group-III nitride single crystal layer; and (4) removing the base substrate. The method provides a substrate which can be suitably used as a base substrate for producing an Al-based group-III nitride single crystal self-supporting substrate, of which surface is formed of a single crystal of an Al-based group-III nitride, and which is free from cracking and warpage.

L'invention porte sur un procédé de fabrication d'un stratifié. Le procédé consiste à se procurer un substrat de base dont une surface est formée d'un monocristal d'une matière différente de la matière utilisée pour constituer une couche monocristalline de nitrure du groupe III à base d'Al à former ; (2) à former une couche monocristalline de nitrure du groupe III à base d'Al dont l'épaisseur est de 10 nm à 1,5 µm sur le plan du monocristal du substrat de base fourni ; (3) à former une couche non monocristalline dont l'épaisseur est égale ou supérieure à 100 fois l'épaisseur de la couche monocristalline de nitrure du groupe III à base d'Al placée sur la couche monocristalline de nitrure du groupe III à base d'Al sans rompre la couche monocristalline de nitrure du groupe III à base d'Al ; et (4) à enlever le substrat de base. Le procédé de fabrication peut fournir un substrat qui peut être utilisé comme substrat de base pour la production d'un substrat autoportant d'un monocristal de nitrure du groupe III à base d'Al ; possède une surface formée d'un monocristal d'un nitrure du groupe III à base d'Al ; et est résistant aux fissuration et aux déformations.

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