Method for producing a precise alloy composition from input...

Details Method for producing a precise alloy composition from input... Method for producing a precise alloy composition from input...

C - Chemistry, Metallurgy

30

B

C30B 29/40 (2006.01) H01L 31/18 (2006.01)

Patent

CA 2125212

- 15 - A Method for Producing a Precise Alloy Composition From Input Variables Under Nonlinear Incorporation Conditions Abstract: A process for manufacturing precise alloy compositions in nonlinear alloy systems. The invention implements a new quadratic fitting function that relates alloy composition CA for a variable A to input fluxes fA and fB, as cA=fA2/(fA2+.beta.fB2). .beta. is a parameter that is used to modify the incorporation of the Group V input variable B. This modification is necessary because of different surface populations of Group V dimer species. This new fitting function precisely predicts alloy compositions in nonlinear systems, such as the GaAs1-yPy system, where y is set equal to the composition cA.

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