Method for producing a semiconductor component, and...

Details Method for producing a semiconductor component, and... Method for producing a semiconductor component, and...

H - Electricity

01

L

H01L 21/28 (2006.01) H01L 21/285 (2006.01) H01L 21/338 (2006.01) H01L 29/423 (2006.01)

Patent

CA 2485561

The invention relates to a method for producing a gate head which can be precisely scaled and for reducing parasitic capacities, for a semiconductor component comprising an at least approximately T-shaped electrode.

L'invention concerne un procédé de production d'une tête de grille de calibrage précis et de réduction des capacités parasites permettant d'obtenir un composant semi-conducteur pourvu d'une électrode au moins approximativement en T.

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