C - Chemistry – Metallurgy – 25 – D
Patent
C - Chemistry, Metallurgy
25
D
26/159
C25D 1/02 (2006.01) C25D 1/08 (2006.01) G03F 7/12 (2006.01)
Patent
CA 1258572
ABSTRACT OF THE DISCLOSURE The present invention relates to a method for producing spinning nozzle plates having funnel-shaped preliminary channels in flow communication with nozzle capillaries. Two embodiments of the method are provided which use photolithograhic and electrodeposition techniques. Common to both embodiments of the method is the use of a metal plate provided with funnel-shaped preliminary channels as a self- aligning irradiation mask for irradiating a photoresist layer provided on the metal plate. Nozzle capillaries subsequently defined either in an electrodeposited layer according to a first embodiment of the invention or in electrodeposited tubular projections according to a second embodiment of the invention, have an offset-free, continuous transition between themselves and the preliminary channels. Photolithographic and electrodeposition techniques may also be used to define the funnel-shaped preliminary channels in the metal plates.
513271
Ehrfeld Wolfgang
Hagmann Peter
Fetherstonhaugh & Co.
Kernforschungszentrum Karlsruhe G.m.b.h.
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