Method for producing magnetic recording layers of thin-film...

Details Method for producing magnetic recording layers of thin-film... Method for producing magnetic recording layers of thin-film...

C - Chemistry, Metallurgy

23

C

204/96.06, 204/1

C23C 14/34 (2006.01) G11B 5/851 (2006.01) H01F 41/18 (2006.01) H01F 41/20 (2006.01)

Patent

CA 1189822

ABSTRACT Method Of Producing A Metallic Thin-Film Magnetic Disk And Arrangement For Implementing This Method Method of and arrangement for producing a metallic thin-film magnetic disk, whereby a chromium undercoat and a magnetic layer, in particular of an FeCoCr alloy, are obliquely sputtered by means of a sputtering system onto a substrate at an angle of incidence of about 60°. The operating pressure of the argon gas atmosphere is between 5 and 15 µbar and the thickness (tCr) of the undercoat, which also influences the coercive field strength, is between about 50 and 180 nm. By means of a sector shutter of suitable shape, the thickness distribution between the inner diameter ID and the outer diameter OD of the storage area of the magnetic disk can be influenced in the desired manner. GE9-80-050

398574

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