Method for producing metal oxide layers of predetermined...

Details Method for producing metal oxide layers of predetermined... Method for producing metal oxide layers of predetermined...

C - Chemistry, Metallurgy

23

C

C23C 14/32 (2006.01) C23C 14/08 (2006.01)

Patent

CA 2722520

The invention relates to a method for producing layers consisting of ternary and higher oxides of metallic and semi-metallic components, wherein the formation temperature of these oxides can be determined essentially through the composition of the binary (or higher) alloy targets (based on the phase diagram).

L'invention concerne un procédé de production de couches composées d'oxydes ternaires et supérieurs de composants métalliques et semi-métalliques, la température de formation de ces oxydes étant sensiblement fixée par la composition des cibles d'alliages binaires (ou supérieurs), sur la base du diagramme de phases.

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