Method for producing multilayered glass-ceramic structure...

Details Method for producing multilayered glass-ceramic structure... Method for producing multilayered glass-ceramic structure...

H - Electricity

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H01L 21/70 (2006.01) H01L 21/48 (2006.01) H01L 23/15 (2006.01) H01L 23/498 (2006.01) H05K 1/03 (2006.01) H05K 3/46 (2006.01)

Patent

CA 1194314

ABSTRACT OF THE DISCLOSURE A method for producing a multilayered glass-ceramic structure with copper-based conductors therein, com- prising the steps of: firing a multilayered structure, in which copper-based patterns and glass-ceramic layers are alternately laminated, in an inert atmosphere containing water vapor, the partial pressure of which is from 0.005 to 0.3 atmosphere at a temperature at which a thermally depolymerizable resin binder contained in the glass ceramic green sheets is depolymerized and elimi- nated, but its glass components and copper exhibit substantially no change in their state; and raising. in an inert atmosphere without water vapor, the firing temperature at which particles of the glass components coalesce, but the metallic state of copper is not affected.

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