Method for providing self-aligned conductor in a v-groove...

Details Method for providing self-aligned conductor in a v-groove... Method for providing self-aligned conductor in a v-groove...

H - Electricity

01

L

356/134

H01L 21/28 (2006.01) H01L 21/306 (2006.01) H01L 21/336 (2006.01)

Patent

CA 1166761

METHOD FOR PROVIDING SELF-ALIGNED: CONDUCTOR IN A V GROOVE DEVICE ABSTRACT A method for providing self-aligned conductors in vertically integrated semiconductor devices which includes providing recesses in the surface of a semiconductor substrate for the fabrication of V- groove devices, providing a conductive layer over the surface and then applying a layer of masking material over the conductive layer to form a planar upper surface, selectively etching the masking material until it remains only in the recesses and then selectively etching the exposed portion of the conductive layer. BU-9-78-012

362828

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