B - Operations – Transporting – 01 – J
Patent
B - Operations, Transporting
01
J
B01J 8/02 (2006.01) B01D 15/00 (2006.01) C01B 15/013 (2006.01)
Patent
CA 2062435
A method for further purifying previously distilled hydrogen peroxide for use in microelectronics in which a hydrogen peroxide starting solution purified initially by distillation is contacted, after the addition of a small amount of chelating agent, with a non-ion-exchanging, polymeric adsorbent, such as a styrene-divinylbenzene copolymer, to obtain a highly purified hydrogen peroxide solution which satisfies the stringent purity requirements for use in producing 4-megabit and 16-megabit microprocessor chips.
Geigel Siegfried
Honig Helmut
Borden Ladner Gervais Llp
Geigel Siegfried
Honig Helmut
Solvay Interox Gmbh
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