Method for purifying nitrogen trifluoride gas

Details Method for purifying nitrogen trifluoride gas Method for purifying nitrogen trifluoride gas

C - Chemistry, Metallurgy

01

B

C01B 21/083 (2006.01)

Patent

CA 2001304

A method is provided herein for purifying a nitrogen trifluoride gas. The method includes the steps of thermally treating a natural zeolite, e.g., analcime, clipnoptilolite, mordenite, ferrierit, phillipsite, chabazite, erionite and laumontite, at a temperature of 250° to 700°C. A packed bed is then formed of such treated zeolite. The nitrogen trifluoride gas containing N2F2 in the amount of 0.2 to 0.6% as gaseous impurities is then passed through the packed bed at a temperature of -125° to 50°C. .

Méthode pour purifier le trifluorure d'azote gazeux. Elle comprend les étapes de traitement thermique d'une zéolite naturelle, p. ex. analcime, clinoptilolite, mordénite, ferriérite, phillipsite, chabazite, énonite et laumontite, à une température de 250 à 700 degrés C. On forme ensuite un lit fixe avec la zéolite ainsi traitée. Enfin, le trifluorure d'azote gazeux contenant 0,2 à 0,6 % de N2F2 comme impuretés gazeuses est envoyé à travers le lit fixe à une température de -125 à 50 degrés C.

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