Method for regulating concentration and distribution of...

Details Method for regulating concentration and distribution of... Method for regulating concentration and distribution of...

C - Chemistry, Metallurgy

30

B

148/1.5

C30B 15/30 (2006.01) C30B 15/00 (2006.01)

Patent

CA 1191075

METHOD FOR REGULATING CONCENTRATION AND DISTRIBUTION OF OXYGEN IN CZOCHRALSKI GROWN SILICON Abstract of the Disclosure Oxygen concentration and distribution within silicon crystal rods drawn according to the Czochralski process from silicon melt contained in a silica crucible, are regulated through variation of both the magnitude and relative sense of direction of seed and crucible rotation rates with uniform distribution of the oxygen being accom- plished by increasing crucible rotation rate to preselected values as a function of crystal rod growth and melt con- sumption.

393195

Affiliated with

Also associated with

Rating

Method for regulating concentration and distribution of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for regulating concentration and distribution of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for regulating concentration and distribution of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1187945