Method for removing boron-containing impurities from halogen...

C - Chemistry – Metallurgy – 01 – B

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C01B 33/03 (2006.01) C01B 33/107 (2006.01)

Patent

CA 2727442

The invention relates to a method for reducing the content of boron-containing compounds in compositions I comprising at least one silicon halide, especially of chlorosilanes of the type H n SiCI4-n with n being equal to 0, 1, 2 or 3, by introducing a small amount of moisture into the composition I in a first step and separating the hydrolyzed boron- and/or silicon-containing compounds in a second step in such a way that a pre-purified composition II having a reduced boron content is obtained, wherein, in particular, the first and second steps can be run in at least one or more cycles. Also claimed is an apparatus for performing the method and an overall system into which this apparatus is integrated.

L'invention concerne un procédé pour réduire la teneur en composés contenant du bore dans des compositions I comprenant au moins un halogénure de silicium, en particulier des chlorosilanes du type HnSiCI4-n, n étant égal à 0, 1, 2 ou 3, par ajout d'une faible quantité d'humidité dans la composition lors d'une première étape et par séparation des composés contenant du bore et /ou du silicium hydrolisé lors d'une deuxième étape, ce qui permet d'obtenir une composition II prépurifiée avec une teneur réduite en bore, la première et la deuxième étape pouvant être notamment être effectuées en au moins un ou plusieurs cycles. L'invention concerne également une installation pour mettre en oevre le procédé ainsi qu'une installation générale dans laquelle cette installation est intégrée.

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