G - Physics – 01 – B
Patent
G - Physics
01
B
340/136, 356/194
G01B 11/30 (2006.01) G01B 11/24 (2006.01)
Patent
CA 1093220
C-2791 D-874 METHOD FOR SENSING THE PATTERN SIDE OF MICROCIRCUIT CHIPS Abstract of the Disclosure A collimated beam of light is directed onto a face of a microcircuit chip. If the configuration side of the chip is up and if the chip has a typical pattern predominantly comprised of two orthogonal sets of lines, the light reflected from the chip will be formed in a cross shaped diffraction pattern with most of the light concentrated in the center of the cross. If, however, the chip is upside down so that a plain face is exposed to the light, the light will be reflected fairly uniformly from the chip. By measuring the reflected light in a small center zone as well as in a larger zone and the light measurements are compared, it can be determined whether the diffraction pattern is present thereby revealing whether the chip is right side up, i.e. configuration side up.
293408
General Motors Corporation
Gowling Lafleur Henderson Llp
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