Method for synthesizing amorphous silicon nitride

Details Method for synthesizing amorphous silicon nitride Method for synthesizing amorphous silicon nitride

C - Chemistry, Metallurgy

01

B

23/195

C01B 21/068 (2006.01)

Patent

CA 1200072

ABSTRACT OF THE DISCLOSURE A method for synthesizing amorphous silicon nitride, wherein silicon halide and ammonia are reacted in a reaction vessel at a high temperature in the absence of oxygen to thereby synthesize amorphous silicon nitride powder, the powder is separated from a gas containing there- in gaseous ammonium halide which has been produced simul- taneously with said amorphous silicon nitride by a collec- ting means, comprises directly mixing, in advance of the separation, cool gas containing therein neither oxygen nor moisture into said gas to cool down said powder and gas so that both substances may be put in said collecting means without deposition of ammonium halide on the inner wall of the reaction vessel, and other component parts.

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