Method for the noncontacting measurement of the electrical...

Details Method for the noncontacting measurement of the electrical... Method for the noncontacting measurement of the electrical...

G - Physics

01

N

324/45

G01N 27/04 (2006.01) G01N 27/02 (2006.01) G01R 27/00 (2006.01) G01R 27/26 (2006.01)

Patent

CA 1057823

METHOD FOR THE NONCONTACTING MEASUREMENT OF THE ELECTRICAL CONDUCTIVITY OF A LAMELLA Abstract of the Disclosure The electrical conductivity of a lamella of conducting material (e.g., semiconductor wafers or metal films) is measured by introducing the lamella into the oscillatory magnetic field of the inductive element of an L-C tank circuit. The tank circuit is the frequency determining portion of an oscillator which is adjusted, upon sample introduction, to restore the magnitude of oscillation. With suitable choice of circuit parameters, the incremental current in the tank circuit is linearly proportional to the sheet conductivity of the lamella. An exemplary apparatus, operating at approximately 10 MHz with a 1 cm2 measurement area exhibited approximately 1% linearity over a 100 to 1 range of conductivity with a resolution of approximately one part in 104 with a limiting sensitivity of 1011 carriers per square cm.

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