C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 16/507 (2006.01) H01J 37/32 (2006.01) C08J 7/18 (2006.01)
Patent
CA 2658796
The invention relates to a method for the plasma treatment of a surface in a hollow body (4), in which firstly the hollow body (4) which has a wall of dielectric material is filled with a process gas, after which the hollow body (4) is sealed gas-tight and introduced into a space (5) between at least two electrodes (1, 2), with the external pressure prevailing in this space (5) being above 0.5 bar, while an internal pressure likewise of at least 0.5 bar prevails in an inner chamber of the hollow body (4), and the space (5) between the electrodes (1, 2) being filled with a gas which has at the external pressure a higher ignition voltage than the process gas at the internal pressure. Finally, a plasma is ignited in the inner chamber of the hollow body (4) by applying a sufficiently high alternating voltage between the electrodes (1, 2).
L'invention concerne un procédé de traitement plasma d'une surface dans un corps creux (4), dans lequel le corps creux (4), qui comporte une paroi en matériau diélectrique, est d'abord rempli d'un gaz de traitement, après quoi le corps creux (4) est refermé de façon étanche aux gaz et introduit dans un espace (5) entre au moins deux électrodes (1, 2). Dans cet espace règne une pression externe supérieure à 0,5 bar, tandis qu'à l'intérieur du corps creux (4) la pression interne est également d'au moins 0,5 bar, et l'espace (5) entre les électrodes (1, 2) est rempli d'un gaz dont la tension d'amorçage à la pression externe est supérieure à celle du gaz de traitement à la pression interne. Un plasma est ensuite amorcé à l'intérieur du corps creux (4) en appliquant une tension alternative suffisamment élevée entre les électrodes (1, 2).
Schlittenhardt Eugen
Thomas Michael
Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Foerschun
Mcfadden Fincham
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