Method for the production of trichlorosilane

Details Method for the production of trichlorosilane Method for the production of trichlorosilane

C - Chemistry, Metallurgy

01

B

C01B 33/107 (2006.01)

Patent

CA 2662487

The invention relates to a method, wherein a tetrachlorosilane- containing reactant gas is reacted with a hydrogen-containing reactant gas at a temperature from 900°C to 1300°C. A trichlorosilane-containing product mixture is produced, which is characterized in that the reaction takes place at a supercritical pressure of the reactant gases.

L'invention concerne un procédé selon lequel un gaz d'éduits contenant du tétrachlorosilane est transformé à une température de 900°C à 1300°C au moyen d'un gaz d'éduits contenant de l'hydrogène, sachant qu'on obtient un mélange de produits contenant du trichlorosilane. Selon l'invention, la transformation a lieu à une pression supercritique des gaz d'éduits.

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