H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/04 (2006.01)
Patent
CA 2399588
The invention concerns a method for treating a surface and a corresponding diamond surface (5A). The method consists in producing ions each having at least three positive charges and in emitting a beam of said ions towards a diamond surface, so as to make at least one surface zone conductive under the effect of the ions. Advantageously, conductive islands (6) are thus formed having a diameter less than 150 nm, which are then preferably used as reservoir for an electron (having a diameter less than 10 nm) or as reservoirs for re-powering cold cathodes. The invention is applicable to microelectronics and for making cold cathodes.
L'invention est relative à un procédé de traitement d'une surface et à une surface de diamant (5A) correspondante. Selon le procédé, on produit des ions ayant chacun au moins trois charges positives et on envoie un faisceau de ces ions vers une surface de diamant, de façon à rendre conductrice au moins une zone de la surface sous l'effet des ions. Avantageusement, on forme ainsi des îlots conducteurs (6) ayant un diamètre inférieur à 150 nm, qu'on utilise ensuite préférentiellement comme réservoirs à un électron (diamètre inférieur à 10 nm) ou comme réservoirs de réalimentation de cathodes froides. Application à la microélectronique et à la fabrication de cathodes froides.
Achard Jocelyn
Bechu Nicolas
Briand Jean-Pierre
Gicquel Alix
Gowling Lafleur Henderson Llp
Universite Pierre Et Marie Curie
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