Method for treating polymer surface

C - Chemistry – Metallurgy – 23 – C

Patent

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C23C 16/513 (2006.01) C08J 7/06 (2006.01) C23C 16/02 (2006.01) C23C 16/24 (2006.01) C23C 16/30 (2006.01)

Patent

CA 2364884

The invention concerns a method for treating a surface for the protection and functionalisation of polymers (4) by gas plasma deposit in a confined chamber (10) of one or several silicon alloy layers (43). The silicon alloy is selected among silicon and its oxides, nitrides, oxynitrides; the deposit is performed at a temperature less than the degradation temperature of the polymer, and a physico-chemical surface pre-treatment by plasma is performed in the same chamber before the silicon alloy is deposited; the pre-treatment consisting in a surface treatment comprising etching a surface zone of the polymer and step which consists in depositing a polymeric carbon compound.

L'invention consiste en un procédé de traitement de surface pour protection et fonctionnalisation des polymères (4) par dépôt par plasma gazeux dans une enceinte (10) confinée d'une ou plusieurs couches (43) d'un alliage de silicium. L'alliage de silicium est choisi parmi le silicium et ses oxydes, nitrures, oxynitrures, le dépôt est effectué à une température inférieure à la température de dégradation du polymère, et un pré-traitement physico-chimique de surface par plasma est effectué dans la même enceinte avant dépôt de l'alliage de silicium, le pré-traitement consistant en un traitement de la surface comprenant la gravure d'une zone superficielle du polymère et en une étape de dépôt d'un composé de carbone polymérique.

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