Method for varying the diameter of a beam of charged particles

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B23K 15/00 (2006.01) H01J 37/12 (2006.01) H01J 37/30 (2006.01) H01J 37/31 (2006.01)

Patent

CA 1061416

A METHOD FOR VARYING THE DIAMETER OF A BEAM OF CHARGED PARTICLES Abstract of the Invention In the bombardment of targets with beams of charged particles, a method for varying and controlling the diameter of such beams by passing the beam through an envelope of conductive material; the envelope is spaced from and coaxial with the beam. A selected D.C. potential is applied to the envelope, and the beam diameter is controlled by changing this applied potential in a direction away from ground potential to increase the beam diameter or by changing the potential in a direction toward ground potential to decrease said beam diameter.

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