Method of adjusting relative positions of two objects by...

Details Method of adjusting relative positions of two objects by... Method of adjusting relative positions of two objects by...

G - Physics

03

B

341/105, 356/194

G03B 41/00 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1226682

Abstract of the Disclosure A method of adjusting a relative positional relationship between two objects uses a diffraction grating. A first diffraction grating is arranged on a first object located to oppose a second object, a reflecting surface is arranged at a position of the second object which corresponds to the first diffraction grating, and the method includes the step of irradiating the first diffraction grating with a radiation beam of coherent light or quasi-monochromatic light and measuring/setting the gap between the first and second objects in accordance with a change in intensity of one of diffracted light components from the first diffraction grating.

473187

Affiliated with

Also associated with

Rating

Method of adjusting relative positions of two objects by... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of adjusting relative positions of two objects by..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of adjusting relative positions of two objects by... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1279323