Method of and apparatus for inspecting transparent object...

G - Physics – 01 – N

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G01N 21/88 (2006.01) G01N 21/90 (2006.01)

Patent

CA 2057670

ABSTRACT OF THE DISCLOSURE A method of and an apparatus for inspecting a transparent object for a defect wherein both of a light blocking defect and a refracting defect can be discriminated not only for presence or absence thereof but also for a shape and a kind thereof and besides discrimination of a small defect can be performed with a high degree of accuracy. According to the method, a pitch of stripes of a reference striped pattern is detected in prior. Then, an object for inspection is placed at an inspecting position, and light having the reference pattern is projected upon the object and transmission light is photographed by an image sensor. A threshold value is set from an average value between two picture element data spaced from each other by one half the detected pitch, and the picture element data are successively compared with the threshold value to determine the bright or the dark thereof. A defect of the object is discriminated from numbers of picture elements determined as the bright and the dark. -40-

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