Method of and apparatus for laser beam machining employing...

B - Operations – Transporting – 23 – K

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327/1.4

B23K 26/08 (2006.01) B23K 26/02 (2006.01)

Patent

CA 2028111

- 18 - ABSTRACT A laser beam machining method employing an off-axis parabolic reflector, and an apparatus for carrying out the same. The laser beam machining apparatus comprises: a laser beam path 920, 42, 46) for guiding a laser beam emitted by a laser along a fixed path of incidence; an off-axis parabolic reflector (22, 50) having a parabolic reflecting surface (24) on which the laser beam is incident; a mirror holding unit (74, 90) for holding the off-axis parabolic reflector (22, 50) in a fixed posture and a fixed orientation; and drive means (80, M6 , M7) for moving the off-axis parabolic reflector (22, 50) held on the mirror holding unit (74, 90) along a circular locus included in a plane including the optical axis of the incident laser beam or in a plane parallel to the former plane. The focus of the reflected laser beam reflected by the off-axis parabolic reflector is moved along a circular locus of a diameter equal to that of the circular locus along which the off-axis parabolic reflector is moved on the objective surface (32) of a workpiece for machining.

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