Method of and apparatus for measuring the thickness and the...

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G01N 21/41 (2006.01) G01B 11/06 (2006.01) G01N 21/45 (2006.01) G01J 9/04 (2006.01) G01N 21/35 (2006.01)

Patent

CA 1195858

ABSTRACT A method of measuring the thickness and refractive index of a transparent material is based on phase difference measurements. A Zeeman effect laser generates a light beam containing two radiation components with slightly different frequencies which produce a first beat with one another at the end of an optical path external to the material. The beam is also split into its two radiation components and two further beats are generated between a first radiation component, which is made to follow a path outside the material, and second radiation components obtained by making the second component follow two dif- ferent paths within the material. The phase differences between these further beats with respect to the first beat are measured by a phase-comparison system, and refractive index values as well as the thickness values can be computed.

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