Method of and apparatus for object or surface inspection...

G - Physics – 01 – N

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G01N 21/88 (2006.01) G01R 31/308 (2006.01) G06F 15/70 (1990.01)

Patent

CA 2089332

ABSTRACT A novel automatic inspection technique and apparatus is disclosed for differentiating differently colored regions of an object or surface (such as solid state wafers, printed circuit boards, or more general applications for distinguishing regions of one color from their neighboring or surrounding areas of different color), involving the use of at least a pair of separate detectors of light images (CCD cameras preferably) reflected from the object or surface and provided with optical filters of different colors corresponding to the differently colored regions of the object or surface; and an electronic filtering processing by multiplying the detector signals by different weighting coefficients selected to maximize the ratio between the filter responses to optimize signal contrast, and then linearly summing the multiplexed signals. Independence from wide light intensity variations and in color variations in the production or processing of the object is thereby obtained.

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