Method of and apparatus for producing diamond thin films

Details Method of and apparatus for producing diamond thin films Method of and apparatus for producing diamond thin films

C - Chemistry, Metallurgy

23

C

204/182, 204/96.

C23C 16/26 (2006.01) C23C 16/27 (2006.01) C23C 16/458 (2006.01) C23C 16/46 (2006.01) C23C 16/50 (2006.01) C30B 25/12 (2006.01)

Patent

CA 2007780

ABSTRACT OF THE DISCLOSURE The present invention concerns a method of producing a diamond thin film, wherein a plasma-activated gas obtained by exciting a starting material containing a carbon source gas is brought into contact with a surface of a substrate, on which a diamond thin film is to be formed under the presence Or an auxiliary member placed adjacent to a con- vexed portion present at the surface Or the substrate, on which the diamond thin film is to be formed, thereby forming the diamond thin film on the substrate, as well as an apparatus for producing a diamond thin film by means of a micro- wave plasma method, wherein an auxiliary member is placed adjacent to a convexed portion present at the surface or the substrate on which diamond thin film is to be formed.

Affiliated with

Also associated with

Rating

Method of and apparatus for producing diamond thin films does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of and apparatus for producing diamond thin films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of and apparatus for producing diamond thin films will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-2047363