Method of and apparatus for pulling up crystal

Details Method of and apparatus for pulling up crystal Method of and apparatus for pulling up crystal

C - Chemistry, Metallurgy

30

B

C30B 15/00 (2006.01) C30B 15/34 (2006.01)

Patent

CA 2375384

An apparatus for pulling up a strip of semiconductor crystal continuously from a crucible with a pair of endless belts has a position control device for automatically adjusting a transverse position of the strip of semiconductor crystal. The position control device is disposed in a path for pulling up the strip of semiconductor crystal from the crucible. The position control device comprises a pair of blocks disposed one on each side of the path transversely of the strip of semiconductor crystal and movable transversely of the strip of semiconductor crystal, and a pair of position sensors mounted respectively on the blocks for detecting respective edges of the strip of semiconductor crystal. The blocks have respective side faces for adjusting a direction in which the strip of semiconductor crystal is pulled up, by contacting the respective edges of the strip of semiconductor crystal.

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