Method of and apparatus for the coating of quartz crucibles...

Details Method of and apparatus for the coating of quartz crucibles... Method of and apparatus for the coating of quartz crucibles...

C - Chemistry, Metallurgy

23

C

32/24, 117/86

C23C 14/24 (2006.01) C23C 14/00 (2006.01) C23C 14/26 (2006.01)

Patent

CA 1247946

ABSTRACT OF THE DISCLOSURE A silicon crucible for use in holding a silicon melt in the drawing of silicon bars for the production of silicon wafers in the semiconductor industry is provided with a protective coating, e.g. of silicon nitride, by the use of a vapor generator in which granules of a low electri- cal conductivity and low thermal conductivity material are disposed between a pair of electrodes and an electric current is supplied which induces localized vaporization from the granules at their contact points but without bodily melting the granules. Nitrogen can be applied to the mass as a car- rier gas and to react with the silicon vapor thus formed.

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