Method of applying a coating by sputtering

Details Method of applying a coating by sputtering Method of applying a coating by sputtering

H - Electricity

01

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204/96.03

H01J 37/34 (2006.01) B05D 1/00 (2006.01) B26B 21/54 (2006.01) C23C 14/12 (2006.01) C23C 14/34 (2006.01) C23C 14/50 (2006.01)

Patent

CA 988055

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