Method of cleaning ion source, and corresponding...

Details Method of cleaning ion source, and corresponding... Method of cleaning ion source, and corresponding...

H - Electricity

01

J

H01J 27/02 (2006.01) H01J 37/08 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2499235

A method and/or system for cleaning an ion source is/are provided. In certain embodiments of this invention, both the anode and cathode of the ion source are negatively biased during at least part of a cleaning mode. Ions generated are directed toward the anode and/or cathode in order to remove undesirable build-ups from the same during cleaning.

L'invention concerne un procédé et/ou un système permettant de nettoyer une source d'ions. Dans certains modes de réalisation, l'anode et la cathode de ladite source sont polarisées négativement pendant au moins une partie d'un mode de nettoyage. Les ions générés sont dirigés vers l'anode et/ou la cathode afin d'en éliminer les formations indésirables pendant le nettoyage.

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