Method of cleaning object

Details Method of cleaning object Method of cleaning object

B - Operations, Transporting

08

B

141/17

B08B 3/02 (2006.01) A61L 9/14 (2006.01) B08B 3/00 (2006.01) B08B 5/00 (2006.01) B08B 5/02 (2006.01) F24F 3/16 (2006.01) F24F 6/14 (2006.01)

Patent

CA 1227401

ABSTRACT A system is provided for circulating gas containing a large number of mist particles of essentially not more than 0.5 micron through clean rooms, such as factories manufacturing LSI circuits, factories manufacturing food and surgical operating rooms, to clear both the rooms and persons and objects located therein. Mist is generated in a tank, preferably a cyclone by spraying water against the tank structure so as to entrain water particles in a gas stream, and the gas stream is then treated to remove oversize particles and passed through a clean room so that the mist particles pick up dust particles and microorgan- isms.

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