Method of depositing inorganic coatings from vapour phase

Details Method of depositing inorganic coatings from vapour phase Method of depositing inorganic coatings from vapour phase

C - Chemistry, Metallurgy

23

C

117/86

C23C 16/44 (2006.01) C23C 14/22 (2006.01) C23C 16/18 (2006.01) C23C 16/22 (2006.01)

Patent

CA 935336

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