Method of depositing nitrogen-doped beta tantalum

Details Method of depositing nitrogen-doped beta tantalum Method of depositing nitrogen-doped beta tantalum

H - Electricity

01

L

204/96.12, 334/7

H01L 27/01 (2006.01) C23C 14/00 (2006.01) H01G 4/08 (2006.01)

Patent

CA 978451

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