Method of determing fluorine

G - Physics – 01 – N

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73/51.5

G01N 21/76 (2006.01)

Patent

CA 1146768

7 PHN 9638 ABSTRACT: A method of determining the concentration of fluorine in a gas flow, in which the gas flow is passed. through a space in which fluorine atoms are formed and after leaving the space the formed fluorine atoms in the gas flow are reacted with a substance while emitting luminescent radiation and the intensity of said radiation is measured, characterized in that elementary silicon is chosen as a material and is provided so as to be optic ally separated from the space.

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