Method of epitaxially growing a laminate semiconductor layer...

Details Method of epitaxially growing a laminate semiconductor layer... Method of epitaxially growing a laminate semiconductor layer...

H - Electricity

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356/178, 356/187

H01L 21/208 (2006.01) B05C 3/09 (2006.01) C30B 19/06 (2006.01) C30B 19/10 (2006.01)

Patent

CA 1036272

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