Method of fabricating an imaging x-ray spectrometer

Details Method of fabricating an imaging x-ray spectrometer Method of fabricating an imaging x-ray spectrometer

G - Physics

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G01T 1/29 (2006.01) H01L 21/223 (2006.01) H01L 21/24 (2006.01) H01L 21/268 (2006.01) H01L 21/383 (2006.01) H01L 27/148 (2006.01) H01L 31/18 (2006.01)

Patent

CA 1253676

ABSTRACT OF THE DISCLOSURE A process is disclosed for fabricating a spectrometer having imaging and energy resolution of X-ray sources. The spectrometer has an array of adjoining rectangularly shaped detector cells formed in a silicon body. The walls of the cells are created by laser drilling holes completely through the silicon body and diffusing n+ phosphorus doping material therethrough. A thermally migrated aluminum electrode is formed centrally through each of the cells.

501849

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