Method of fabricating diffraction grating masters and...

Details Method of fabricating diffraction grating masters and... Method of fabricating diffraction grating masters and...

C - Chemistry, Metallurgy

25

D

204/12, 204/206,

C25D 17/10 (2006.01) C25D 7/00 (2006.01) G02B 5/18 (2006.01) G06K 19/16 (2006.01)

Patent

CA 1071135

Abstract of the Disclosure A method of producing a diffraction grating master which comprises exposing a plurality of reduced first grating patterns on a light sensitive layer in conformance with a pre- determined code; processing the light sensitive layer to produce first gratings therein; exposing a plurality of reduced second grating patterns on the light sensitive layer (superimposed on the first gratings) and repeating the processing step to produce the second gratings; vacuum depositing a layer of silver on the superimposed first and second gratings; electroplating a layer of nickel on the silver layer on the superimposed gratings; separating the resulting nickel-silver layer from the light sensitive layer; and reinforcing the nickel-silver layer (formed in the pattern of the first and second gratings) for use as an embossing master. A special electroplating fixture used in the electroplating step insures that the nickel layer being deposited lies flat without "peeling".

259156

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