Method of fabricating film for solar cells

Details Method of fabricating film for solar cells Method of fabricating film for solar cells

H - Electricity

01

L

H01L 31/18 (2006.01) H01L 31/032 (2006.01)

Patent

CA 2285788

A method of fabricating Cu.alpha.(In x Ga1-x).beta.(Se y Si-y)Y films for solar cells includes forming an electrode on a substrate and supplying the substrate and electrode with Cu, In, Ga, Se, and S to form a Cu.alpha.(In x Ga1-x).beta.(Se y Si-y)Y film. Simultaneously with the supplying of Cu, In, Ga, Se and S, the substrate is supplied with water vapor or a gas that contains a hydroxyl group.

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