Method of fabricating oxide superconducting film

Details Method of fabricating oxide superconducting film Method of fabricating oxide superconducting film

C - Chemistry, Metallurgy

23

C

204/96.3

C23C 14/08 (2006.01) C23C 14/28 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2016354

An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.

On forme un film superconducteur d'oxyde par déposition par laser, obtenue en envoyant le faisceau d'un laser excimère (1, 21) sur une cible (3, 23), au travers d'une lentille convergente (2, 22) et en déposant des atomes ou des molécules, ou les deux, diffusant depuis la cible (3, 23) jusque sur le matériau de base. La lentille convergente (2) est réglée à l'aide d'une lentille cylindrique ou bien la lentille convergente (22) est déplacée, de telle manière qu'une portion (4, 25) de la cible (3, 23), irradiée par le faisceau du laser (1, 21), soit linéarisée. Il est ainsi possible de former un film superconducteur d'oxyde, homogène en termes d'épaisseur de film mais aussi de propriétés, dans une zone représentant une surface relativement importante du matériau de base (5).

Affiliated with

Also associated with

Rating

Method of fabricating oxide superconducting film does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating oxide superconducting film, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating oxide superconducting film will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1524156