Method of fabrication of air/fuel sensors based on...

Details Method of fabrication of air/fuel sensors based on... Method of fabrication of air/fuel sensors based on...

G - Physics

01

N

26/201

G01N 27/26 (2006.01) G01N 27/419 (2006.01)

Patent

CA 1310177

ABSTRACT OF THE DISCLOSURE A method is disclosed for making planar oxygen-solid electrolyte sensors. The method involves coating the several layers onto a support, selectively etching an etchable layer to form areas wherein the electrode layers and electrolyte layers may be formed thereon and, finally, etching the etchable layer totally away in order to form a chamber therein.

581862

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