Method of fabrication of electronic devices using...

Details Method of fabrication of electronic devices using... Method of fabrication of electronic devices using...

H - Electricity

01

L

H01L 27/01 (2006.01) H01L 21/77 (2006.01) H01L 27/15 (2006.01) H01L 27/28 (2006.01) H01L 51/40 (2006.01) H01L 33/00 (2006.01)

Patent

CA 2449632

A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.

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